The ANT130-L employs a center-driven, non-cogging, noncontact linear motor and encoder as the driving element. Since the linear motor is a direct-drive device there is no backlash, windup, or “stiction” normally associated with a lead- or ball-screw drive.

The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ANT130-L to a peak unloaded acceleration of 1 g and a maximum velocity of 350 mm/s. The result is a high-accuracy device with outstanding dynamic performance, with throughput that significantly outperforms comparable high-accuracy screw-driven or other stages in its class.

Outstanding step-to-step resolution is required for alignment applications. The ANT130-L meets this demand with an incremental step size of 1 nm when coupled with Aerotech drives and controls. The direct-drive linear motor allows the ANT130-L to make precise, small resolution steps, which is particularly important in alignment applications where step accuracy is critical.

Like all stages in the Aerotech product family, the ANT130-L was designed for long-term performance. Both the linear motor and linear encoder are noncontact devices to provide a long, maintenance-free life. A moving magnet-track design eliminates the need for cable management, further improving long-term reliability.

ANT130-L series stages are easily configured as XY assemblies. Options include precision orthogonality alignment to 5 arc seconds as well as vertical axis solutions.

Aerotech
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