The ANT95-R and ANT130-R rotary stages incorporate Aerotech’s unique direct-drive for extremely smooth motion, and both are available in 20°, 180°, or 360° continuous travel. Maximum speed is 200 rpm and maximum acceleration is 400 rad/s2. Axial load capacity is 2 kg for the ANT95-R and 3 kg for the ANT130-R. These rotary stages also offer an 11 mm clear aperture that can be used for product feed-through, laser beam delivery, cable clearance, or application-specific requirements. Error motion specifications are outstanding.

The ANT95-R and ANT130-R series are designed for compatibility and easy integration with Aerotech’s ANT linear stages. Together these stages provide the accuracy, stability, and performance required for current and future nanomanufacturing and inspection applications. Their low profile reduces the effective working height, minimizing “stack-up” related errors when used as part of a multi-axis system.

The ANT95-R and ANT130-R were designed to operate in a 24/7 manufacturing environment while providing laboratory-grade accuracy. Unlike other extremely precise rotary devices, they require no periodic maintenance, and our direct-drive ensures years of trouble-free operation.

The ANT95-R series data sheet is available at:
http://www.aerotech.com/products/NANO/ant95r.html

The ANT130-R series data sheet is available at:
http://www.aerotech.com/products/NANO/ant130r.html

Aerotech
www.aerotech.com

Linear Motion Tips

The URS50BPP and the URS50BCC provide very low wobble and backlash-free, continuous rotation with extremely high MTBF of up to 20,000. Competitively priced, the high-performing rotation stages feature large stage performance in a very small package. The two stages also offer exceptional 6µm eccentricity and easy integration.

The URS50B’s feature a one of a kind, two-part bearing design with pre-tempered bearings and steel gears to ensure long-life motion positioning and precision. The URS50BCC, the DC-motor version with embedded index pulse for precision homing, is best suited for demanding applications that need bi-directional positioning.

The economical URSBPP stepper motor version is ideal for less demanding, yet precision rotation applications. Each URS50B has a cable URS50B for plug-and-play compatibility with XPS, SMC and ESP.

Linear Motion Tips

The ASRT is offered with either high accuracy encoder or magnetic encoder feedback. Unlimited travel is standard, with an optional limited travel model also available. Three different models cover a wide range of load and torque requirements.

The ASRT series uses Aerotech’s brushless, slotless motor that has no brushes to wear, no gear trains to maintain, and high acceleration and high speeds. The low inertia and zero backlash make the ASRT the ideal solution for applications requiring frequent directional changes. In addition, Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.

Dual large-diameter bearings are used to maximize performance with respect to tilt error motion (3 arc sec), moment stiffness, and repeatability (1 arc sec). The large diameter bearings permit large payloads (up to 175 kg) without compromising performance.

Maximum rotary speeds are from 100 to 200 rpm. The ASRT includes an electrically grounded shaft and housing to protect against electrical shock and eliminate RF re-radiation, and housing grounding points are included. Circular sealed connectors are standard, while options include desiccant cartridge, air purge, and mounting flange accessory.

A polymer-based paint on the housing and a hard-coated tabletop prevent corrosion. The stage has optional brown, green, grey, black, and white paint colors. Standard operating temperature is 0 to 70°C. Operation below freezing requires the optional air-purge and desiccant, with air-purged stages operational from -20 to 70°C.

Aerotech
www.aerotech.com

Linear Motion Tips

The lightweight design feature low 32 mm profile height and incorporates anodized aluminum body with pre-loaded ball bearings with run-outs of 5 microns. This proprietary bearing design provides smooth rotation with minimal wobble.

A precision ground worm gear produces consistent driving torque to the rotor and eliminates variations in the motor current.

RTHM-100 stages feature an angular resolution 0.1 arc-sec, which may be achieved with either DC Servo or stepper motor controls.

The stages are equipped with a reference home sensor. RTHM-100 stages can run in continuous or start/stop rotation modes and mounted horizontally or vertically.

These stages feature zero backlash, large 50 mm center aperture and can rotate loads of 20 kg over unlimited rotation angle.

IntelLiDrives, Inc.
www.intellidrives.com

Linear Motion Tips

The M-660 PILine® rotation stage allows high positioning speeds to 720 degrees /sec. It also features a very low profile of 15 mm (0.6") and a 35 mm Ø clear aperture

The M-660 stage reaches top speeds of 720 degrees/sec. and resolution to 40 µrad (8 arcsec). Its self-locking ceramic drive holds the position steady at rest, with no energy consumption and heat generation. A directly coupled precision optical encoder provides phase lag-free, backlash-free feedback to the servo controller.

Features & Advantages

* Max. Velocity 720 °/s, Unlimited Travel Range
* Low Profile: Only 15 mm (0.6”)
* Self-Locking Ceramic Direct Drive: Energy Saving & High Position Stability
* Direct Metrology Linear Encoder, 40 µrad Resolution (8 arcsecs)
* PILine® Drive: Non-Magnetic, Vacuum-Compatible Working Principle
* Compact Combinations with Linear Stages Available

The compact design with minimized mass and inertia provides high precision bidirectional speed and position control, as well as high speed motion contouring. The M-660 is based on the new U-164 Piezo Motor and outperforms the stability, acceleration and settling speed of traditional servo motor direct drives and gear-driven mechanisms. The innovative motor drive was also chosen by Leica Geosystems AG’s in their newest generation of surveying instruments for geodesy, because it can provide significantly higher speeds, shorter positioning times and a very high positioning accuracy when moving the measuring optics.

A newly designed piezo motor controller is available to take advantage of the specific motion characteristics of ultrasonic ceramic motors. USB interfacing and a solid software and driver package for seamless integration are included.

PI (Physik Instrumente) L.P.
www.physikinstrumente.com

Linear Motion Tips