ALIO Industries is meeting the exacting demands of OEMs producing cutting edge 3D metrology tools in what is a dynamic and ever more competitive sector as industry demands more and more accurate metrology solutions.
ALIO provides near air-bearing performance crossed roller bearing XY Nano Metrology stages with up to 450-mm travel range. The stages use dc servo linear motors with unmatched motion performance with 3-Sigma, 6-D (linear, straightness, flatness, pitch, yaw and roll) and bi-directional repeatability of less than +/- 250 nm. In other words, the volumetric bi-directional repeatability of any XY point is within a sphere of 500 nm or less.
Near air-bearing performance crossed roller bearing XY Nano Metrology stages are well suited as motion control solutions from compact 2D systems to large field of view (FOV) 3D metrology tools due to their high precision, accuracy, repeatability, stability, large travel range, low maintenance, compact design, and adaptability. These characteristics make them suitable for various industrial and scientific applications where high-performance motion control is required.
Market-leading metrology tools rely on high-quality sensors and encoders to provide accurate measurements of objects or surfaces. However, the performance of these components is intrinsically tied to the underlying motion system that positions and moves the measurement tools. The motion system must be at least as good, if not an order of magnitude better, than the sensors and encoders to ensure the required accuracy.
“There are several reasons for this. The motion system is responsible for the precise positioning and movement of the sensors and encoders during the measurement process,” explains Bill Hennessey, Founder and President of ALIO Industries. “Any errors in the motion system, such as mechanical backlash, hysteresis, or non-linearity, can introduce inaccuracies in the measurements, regardless of the quality of the sensors and encoders. By ensuring that the motion system is of equal or superior quality, these errors can be minimized, allowing the high-performance sensors and encoders to operate at their full potential.”
A stable and precise motion system is also essential for maintaining the position and orientation of the sensors and encoders during measurements. Any vibrations, drift, or fluctuations in the motion system can affect the accuracy of the readings. The chosen motion system should provide the necessary stability and precision to prevent such issues, ensuring that the sensors and encoders maintain their required accuracy.
As metrology tools evolve and improve, the demand for higher accuracy and precision will continue to grow. By using a motion system that is an order of magnitude better than the current sensors and encoders, manufacturers can ensure that their metrology tools are future-proof and capable of accommodating new technologies and advancements.
For more information, visit www.alioindustries.com.
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