IntelLiDrives, Inc. (www.intellidrives.com) has unveiled a direct drive rotary table that provide superior velocity control and angular positioning with large apertures, making it suitable for applications in wafer inspection and cutting, semiconductor manufacturing equipment, optical applications, fiber-optics alignment, robotics and precision part indexing.

Compared to conventional worm and gear drives, the PSR300 rotary table rotates significantly faster and delivers higher equipment productivity and more accurate processed parts as it feature zero backlash with no vibration and gear wear.

Tested to 300 rpm continuous rotation of the traditional transmission based rotary table with comparable payload capacity and apertures, the rotary table employs direct drive brushless modular motor technology to maximize positioning performance. Aside from delivering high speeds and acceleration, this technology also has no gear trains to maintain and no brushes to wear, making the PSR300 rotary table ideally suited for applications that demand for smooth scan velocity, contoured motion and precise incremental steps.

 

To optimize performance with respect to rotation friction, wobble and moment stiffness, bearing with low run-outs are utilized, while a precision ground top rotor is employed to further reduce wobble.

The rotary table features sub arc-second high resolution encoder to ensure accurate positioning. Its motor and ring encoder are directly connected to a rotating shaft. The absence of mechanical couplings and gear trains effectively eliminates positioning errors attributed to windup, backlash or hysteresis. This enables the PSR300 rotary table to achieve a bi-directional repeatability of ±0.5 arc sec and an accuracy of ±5 arc sec.