The ALS130H, with its sub-nanometer resolution, bi-directional
repeatability, and low-velocity performance is the
unparalleled solution for high performance test, measurement,
inspection, and other demanding applications. The ALS130H employs a
center-driven, non-cogging linear motor as the driving element. Since
the linear motor is a direct-drive device, there is no backlash,
windup, or “stiction” normally associated with a lead screw or
ball-screw drive. The moving magnet track design eliminates the need
for cable management and further improves long-term reliability.
linear motor drive also offers the advantage of higher speeds and
accelerations. The compact yet powerful linear motor drives the ALS130H
to a peak unloaded acceleration of 1 g and a maximum velocity of 300
mm/s. The result is a high-performance stage with outstanding
throughput that significantly outperforms comparable high-accuracy
step-to-step resolution is critical for alignment applications. The
ALS130H meets this demand with a resolution of 0.5 nm. The direct-drive
linear motor allows the ALS130H to make precise, small resolution
steps, which is particularly important in alignment applications where
step accuracy is critical.
ultra-stiff construction and compact two-piece design result in a stage
with unmatched geometrical tolerances. Straightness and flatness for
the standard ALS130H is <±2 µm over the entire travel.
The ALS130H utilizes precision
anti-cage-creep cross-roller bearings for the smoothest motion. Since
neither the bearing system nor the drive system utilize any
recirculating elements, the ALS130H exhibits the ripple-free motion
required for high-precision scanning and inspection applications.