New direct-drive linear motor stages deliver sub-nm resolution

Physik Instrumente (PI) has released a new precision feedback option for its linear stages equipped with direct-drive ironless three-phase motors.

The V-551 family of ultra-precision positioning stages is equipped with precision crossed roller bearings featuring anti-creep cage assist and guiding accuracy of 1 µm straightness/flatness per 100 mm.

Two types of position feedback systems are available: absolute-measuring encoders providing 2 nm resolution and incremental encoders providing 0.2 nm resolution with effective 0.5 nm minimum incremental motion at the stage platform.

Ironless linear motors are used when high dynamics needs to be combined with extremely smooth motion. They are suitable for applications where extremely constant velocity is required, such as in optics inspection, metrology, photonics, interferometry, and semiconductor test equipment. The frictionless, zero-wear motor drives are also common in fast automation applications, where reliability and maximum up-time are mission-critical.

For more information, visit www.pi-usa.us.