New ACR-32UT direct-drive rotary stages from IntelLiDrives feature a low-profile and high-speed direct-drive servomotor. Center aperture and lightweight construction makes these rotary stages a good fit for semiconductor manufacturing as well as general automation applications.
The ACR-32UT has a wide dynamic speed range and can move at sub-rpm speed with low velocity ripple and accelerate quickly to 2,000 rpm. The stages can be easily installed into IntelLiDrives low profile open frame XY tables with a minimal stack-up height to minimize Abbe error.
These features make the ACR-32UT outperform the stability, acceleration and settling speed of traditional servo motor gear-driven mechanisms. IntelLiDrives offers a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.
Resolution: 0.5 arc-sec
Repeatability: 1 arc-sec
Speed: 2,000 rpm
Diameter: 118 mm
Center aperture: 32 mm
Ultra-thin design: 22 mm
For more information, visit www.intellidrives.com.