Photonics solutions specialist Newport Corporation (www.newport.com) has announced the release of the ZVR, a specialized Integrated Vertical and Rotation Stage ideal for use in semiconductor wafer positioning, inspection, metrology and repair. The all new stage is also suited for use in LED production and in various applications such as digitizing models, 3D scanning and validation.
The compact and rigid design of the ZVR offers improved cantilevered load capacity. Unlike earlier designs, the new stage features significantly lower cross-talk and provides higher dynamic system performance even with a very low-profile footprint. Its capacity to accommodate a wide array of rapid step-and-settle positioning applications is attributed to its low mass and naturally high frequency.
Specifically designed with a wide, three-point base, the ZVR vertical platform also has a 10 mm stepper-motor-driven Z-stage. Its stainless steel ball bearings enable the integrated stainless steel rotation stage to deliver smooth operation.
Newport offers the ZVR in two different models — the ZVR-PC with a servo-driven DC motor and the ZVR-PP with a stepper motor. Both variants offer continuous 360-degree rotation for angular travel. The Z-stage can also be availed with an optional linear encoder or without the rotation stage.
Its highly-stable, three point bottom interface allows easy mounting to XY stage or other platform. A clear and large aperture through the stage’s center simplifies management of electrical cable and vacuum-chuck cable/hose. For more convenience, all vacuum chuck and electrical utility connections are found at a single connection.