White paper explains design and preparation of nanopositioners for high vacuum

For decades, PI has provided stages and systems for vacuum levels from 10-3 mbar to 10-9 mbar that deliver reliable motion control for positioning and alignment.

The newest catalog from PI — Precision Motion and Positioning Solutions for High Vacuum and UHV — demonstrates PI’s expert design capabilities as most standard products are created with vacuum compatibility in mind, from linear and rotary stages to 6-axis hexapods.

Dr. Gallus’ whitepaper Motion and Positioning in Vacuum Environments delves into the specific consideration that must be given when designing a vacuum system …

… including operating speed, stage lifetime expectancy, use of lubricants and coatings, material selection, outbaking temperatures for high and ultra-high vacuums, and more.

“Throughout the worldwide research and development field, vacuum environments are used, from small epitaxy processes up to the large beamline facilities,” said Dr. Jürgen Gallus, technical engineer responsible for PI vacuum technology research and development.

PDF download: Precision motion and positioning solutions for high vacuum and UHV catalog

PDF download: Motion and positioning in vacuum environments

Related article: Advances in precision positioning stage design-optimized outgassing and motion performance in ultra-high vacuum applications

PI is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for four decades.