The XYR-03-01 Alignment Stage from Optimal Engineering Systems Inc. (OES) is a high resolution, high repeatability XY-Theta stage for such applications as angular glass cutting and grinding, wafer alignment, semiconductor handling, laser cutting and drilling.
The linear resolution of the X and Y axis is 5 µm (non-micro-step) or 0.125 µm (20 micro-steps per step motor driver in use), the repeatability is 1.5 µm, and positional accuracy is 5 µm. The 1 mm per-turn lead screws and preloaded V-groove and crossed roller bearings add to the high precision and stiffness of the XYR-03-01 alignment stage. The linear travel of the X and Y axes is 50 mm x 50 mm.
The 100 mm diameter theta stage is driven by a precision 90:1 ratio worm gear. The resolution of the theta stage is 0.02O (when not in microstep mode) or 0.001° — 20 micro-steps per step with the motor driver in use. Repeatability is 0.005° positional accuracy is 0.01° … with 0.005° backlash.
Two-phase stepper motors are standard. The knob for manual adjustments of each axis can be replaced with an incremental encoder for position verification or closed loop operation. These black anodized aluminum XY-theta stages are easy to integrate into new or existing systems. Compatible motion controllers are available from OES and the XYR-03-01 Alignment Stage can also be ordered as a complete plug-and-play system.
Optimal Engineering Systems, Inc. (OES) is a manufacturer of motion control products including: Stepper motor controllers and drivers, solenoid electronics, and positioning stages and slides. Applications include: Animation, automated assembly systems, automation, CNC machines, flight simulation, inspection systems, linear and rotary stages, machine tools, medical devices, motion control camera boom systems, optical comparators, CMMs, pan-tilt gimbals, PCB assembly & inspection, pick-and-place, positioning stages, robotics, scanners, security cameras, telescope drive mechanisms, time-lapse photography and winders. For additional information, visit oesincorp.com.
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