PI’s family of miniature micro and nanopositioning stages is expanding with the new RS-40 rotary stage and M-111 linear stages as engineers gave specific consideration to material selection, use of lubricants and coatings, and outbaking temperatures for high and ultra-high vacuum conditions.

With 360-degree rotation range and 20-N load capacity, the RS-40 V7 stage boasts high angular velocity of 20°/sec and minimum incremental motion and repeatability of 87 µrad. The 20-mm diameter aperture allows rotation of filters and optics. The compact size makes the RS-40 rotary stage suitable for small vacuum chambers. The new RS-40 stage is powered by a special vacuum rated stepper motor and suitable for vacuum levels up to 10^-7 hPa.

The new 110, M-111 and M-112 vacuum linear stage series provide travel ranges of 5, 15 and 25 mm and are suitable for vacuum up to 10^-6 hPa. The linear stages also provide a clear aperture of 10 mm. The miniature linear stages are powered by a closed-loop dc gear motor with an integrated encoder, and backlash-compensated lead screw and provide sub-micrometer resolution with 0.05 µm minimum incremental motion and position repeatability up to 0.25 microns.

PI provides a wide range of vacuum and UHV compatible linear stages and rotary stages for nanopositioning and micropositioning applications, including piezo flexure stages, piezo motor solutions and even multi-axis systems such as 6-DOF hexapod parallel positioners to cover the most demanding vacuum motion applications. Industries served include semiconductors, aerospace, optics and photonics, precision automation, life-sciences, and big science research.

For more information, visit www.pi-usa.us/en.