PI miCos (www.pimicos.com) announce the release of its latest range of high precision air bearing rotation stages which deliver high speed, high dynamics and extreme accuracy.

Available in four different stages, the UBR-AIR family of high precision air bearing rotation stages features a diameter that range from 100 mm to 270 mm, a profile height of only 55 mm and a load capacity of up to 40 kg.

The UBR-AIR bearing stages are driven by a direct-drive torque motor and fitted with a reference class optical direct-metrology scale encoder. In addition, they also achieve angular resolution down to 0.00002 degrees, repeatability of 0.00003 degrees and a maximum velocity of 360 degrees per second.

Aside from minimizing wobble to 1.25 μrad, the air bearings also reduce friction to the minimum while offering superior speed, lifetime and velocity constancy.

Featuring remarkable flatness and low eccentricity at ± 0.07 μm, the stages are ideally suited for various applications like precision positioning of synchrotron optics, semiconductor wafer inspection, x-ray diffraction as well as optical metrology and inspection.

Brushless direct-drive torque motors, which directly couple the drive with the moving stage platform, ensure that the stages will deliver longer service life and high velocity. The direct drive optimizes acceleration capabilities, angular stiffness and dynamics while eliminating hysteresis and backlash.